1200C Atmosphere CVD Lab Electric Furnace High Consistency Testing
Oven
Tube Lab Eelctric Furnace Features :
High film deposition rate: RF glow technology, greatly increasing the deposition rate of the
film, the deposition rate can reach 10Å / S
High area uniformity: Advanced multi-point RF feeding technology, special gas path
distribution and heating technology, etc., make the film uniformity
index reach 8%
High consistency: using the advanced design concept of the semiconductor industry,
the deviation between the substrates of one deposition is less than
2%
High process stability: Highly stable equipment ensures continuous and stable process
Main technical parameter of SUPER CVD Tube Lab Electric Furnace:
| Product name and model | SP-1200T-84 lab electric furnace |
| Heating tube size(OD×L) | Dia80x400mm |
| Chamber insulation materials | light weight aluminum oxide fiber ceramic |
| Maximum temperature | 1200°C working time ( < 3 hours) |
| Working temperature | 400-1100°C (adjustable, for long time ) |
| Temperature control | Intelligent 30 segments programmable and PID auto control |
| Heating rate | 1-15℃/min (adjustable) |
| Temperature accuracy | ±1℃ |
| Thermocouple | K type |
| Heating element | resistance wire |
| Ultimate vacuum | -0.1Mpa |
| Vacuum pump specifications model | 0.5A, pumping rate 0.5L/S, power 120W |
| Furnace shell | Double shell with fan cooling |
| Temperature display mode | Four Figure Liquid Crystal Display |
| Working power | AC 1-phase, 110V-240V, 50Hz/60Hz |
| Spare function | installed computer communication module and RS485 communication
interface,to realize the remote control. |
SP-1200T CVD tube furnace standard model
| Model | Heating zone (OD×L mm) | Work power | Vacuum pump specifications |
| SP-1200T-53 | Φ50x300 mm(2.0"x12") | AC 1-phase/3-phase 110V-400V 50Hz/60Hz. | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-54 | Φ50x400 mm(2.0"x16") | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-55 | Φ50x500 mm(2.0"x20") | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-63 | Φ60x300 mm(2.5"x12") | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-64 | Φ60x400 mm(2.5"x16") | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-65 | Φ60x500 mm(2.0"x20") | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-83 | Φ80x300 mm(3.2"x12") | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-84 | Φ80x400 mm(3.2"x16") | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-104 | Φ100x400 mm(4.0"x16") | TW-0.5A;0.5L/S;120W;110V/220V |
| SP-1200T-154 | Φ150x400 mm(6.0"x16") | TW-1A;1L/S;120W;110V/220V |
Delivery times :
♥ For some normal standard size furnaces and components, we have in
stock; So we can send out in 2-3 days;
♥ Other customized sizes the delivery time is from 15 days to 20
days according to different products request.
Our Warranty :
One year limited warranty with lifetime support, excluding heating
element and ceramic tube damaged by user.
Attention: Any damages caused by the use of corrosive and acidic gases, and
any damage from wrong operate and use are not under the coverage of
One Year Limited Warranty.
